Process for the separation of a gaseous hydride or a mixture of gaseous hydrides with the aid of a membrane
US5503657A · kind A · utility
15Cited by
15References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 14, 1994 |
| Grant date | Apr 2, 1996 |
| Priority date | — |
| Expiry date | Sep 14, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/0262
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The invention relates to a process for the separation of a gaseous hydride or a mixture of gaseous hydrides from a gaseous medium containing at least one gas from the group consisting of H.sub.2, Ar, He, according to which the gaseous medium is passed on to a membrane module so that the concentration of the hydride or of the mixture of hydrides obtained at the outlet of the module is higher than their initial concentration in the gaseous medium.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.