Apparatus for applying a mask to and/or removing it from a substrate
US5503675A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Dec 7, 1993 |
| Grant date | Apr 2, 1996 |
| Priority date | — |
| Expiry date | Dec 7, 2013 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/50
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
First and second transport chambers are joined to one another through a common opening (5), and house respective substrate carriers (6, 7) mounted for rotation about parallel axes. In at least one position the carriers may be superposed, plungers (14 and 15) being disposed in the area of this superposition on opposite sides of the carriers, both carriers being longitudinally displaceable parallel to the pivot axes (a and b, respectively). After a coating operation in the second transport chamber, the second plunger releases the mask from the second carrier, moves it back to the first carrier where the substrate is peripherally engaged, then moves the mask still further in order to release it from the substrate. The second plunger then retreats, and the coated substrate can be rotated in the first chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.