Porous dielectric material with improved pore surface properties for electronics applications
US5504042A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 23, 1994 |
| Grant date | Apr 2, 1996 |
| Priority date | — |
| Expiry date | Jun 23, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
This invention provides an improved porous structure for semiconductor devices and a process for making the same. This process may be applied to an existing porous structure 28, which may be deposited, for example, between patterned conductors 24. The process may include baking the structure in a reducing atmosphere, preferably a forming gas, to dehydroxylate the pore surfaces. The process may include baking the structure in a halogen-containing atmosphere to bond halogens to the pore surfaces. It has been found that a porous structure treated in such a manner generally exhibits improved dielectric properties relative to an untreated sample.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.