Piezoelectric/electrostrictive element having electrode film(s) with specified surface roughness
US5504388A · kind A · utility
33Cited by
4References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 8, 1994 |
| Grant date | Apr 2, 1996 |
| Priority date | — |
| Expiry date | Mar 8, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04R17/08
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A piezoelectric/electrostrictive element is disclosed which includes at least one piezoelectric/electrostrictive portion each of which consists of a lower electrode film, a piezoelectric/electrostrictive film and an upper electrode film. In this element, at least the lower one of the electrode films has a surface roughness represented by maximum peak-to-valley roughness height Rmax. or Ry which is in a range of 3 .mu.m.about.14 .mu.m, and a surface roughness represented by centerline mean roughness Ra which is not larger than 2 .mu.m.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.