Patent · US Expired

Excimer lamp with high pressure fill

US5504391A · kind A · utility

47Cited by
19References
18Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 27, 1993
Grant dateApr 2, 1996
Priority date
Expiry dateJan 27, 2013

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY02B20/00
  • WIPO fieldElectrical machinery, apparatus, energy
  • WIPO sectorElectrical engineering

Abstract

An excimer lamp utilizing a high pressure fill. The fill includes a halogen at an operating pressure of greater than about 350 torr or the combination of a halogen and a rare gas at a total operating pressure of greater than about 2.5 atmospheres.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.