Cantilever probe and apparatus using the same
US5506829A · kind A · utility
45Cited by
6References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 3, 1994 |
| Grant date | Apr 9, 1996 |
| Priority date | — |
| Expiry date | Jun 3, 2014 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/873
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A cantilever probe comprising a cantilever displacement element containing a piezoelectric material provided between driving electrodes for causing displacement of the piezoelectric material, a probe for information input and output provided on the free end of the element, a drawing electrode for the probe and, a non-electroconductive thin film provided on at least a portion of an end of the element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.