Interferometer, optical scanning type tunneling microscope and optical probe
US5508805A · kind A · utility
5Cited by
5References
44Claims
0Family size
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Key dates
| Filing date | Jun 29, 1994 |
| Grant date | Apr 16, 1996 |
| Priority date | — |
| Expiry date | Jun 29, 2014 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/868
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
In an optical scanning type tunneling microscope, reference light is prepared in addition to light used to be projected to a sample, and this reference light and also light picked up from an optical probe are caused to interfere with each other. As a result, phase information of light about a region having a very smaller dimension than a wavelength of the light irradiated from alight source can be acquired.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.