Cooled window for X-rays or charged particles
US5509046A · kind A · utility
7Cited by
2References
20Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 6, 1994 |
| Grant date | Apr 16, 1996 |
| Priority date | — |
| Expiry date | Sep 6, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2235/1262
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A window that provides good structural integrity and a very high capacity for removal of the heat deposited by x-rays, electrons, or ions, with minimum attenuation of the desired beam. The window is cooled by providing microchannels therein through which a coolant is pumped. For example, the window may be made of silicon with etched microchannels therein and covered by a silicon member. A window made of silicon with a total thickness of 520 .mu.m transmits 96% of the x-rays at an energy of 60 keV, and the transmission is higher than 90% for higher energy photons.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.