Diaphragm pressure sensor including anti-stock protection means and gradiomanometer incorporating such a sensor
US5509312A · kind A · utility
19Cited by
16References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 25, 1994 |
| Grant date | Apr 23, 1996 |
| Priority date | — |
| Expiry date | May 25, 2014 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N9/26
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure sensor (20) comprises a deformable diaphragm (22) which closes a fluid passage (18) in sealed manner. In order to protect the diaphragm (22) from shocks, the passage includes a restriction (44) whose dimensions are so designed as to limit the pressure peak applied to the diaphragm to a cutoff value which the diaphragm can withstand. The restriction (44) may be formed in a detachable capillary tube (42) or it may be in the form of grooves in a small silicon plate integrated in the active portion of the sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.