Sacrificial structure masking method for disk drive slider assemblies and sliders made thereby
US5509554A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Nov 14, 1994 |
| Grant date | Apr 23, 1996 |
| Priority date | — |
| Expiry date | Nov 14, 2014 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49041
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A sacrificial structure masking method for disk drive slider assemblies. Pico size air bearing surfaces (ABS) for sliders are created by mounting parallel slider rows into a carrier. The ABS are then established by positioning a mask having a sacrificial structure within the slider area, over the carrier and/or along cut zones between individual sliders. Once the masks are positioned, the carrier is exposed to transfer the pattern to the slider rows. The mask is then removed and the exposed area is etched from the slider rows. After the etching process, the masked portion of the slider is raised slightly to form the air bearing surfaces. Where a rear sacrificial structure is positioned over the carrier, no remnant is left on the slider surface after the etching step. However, sacrificial structures positioned within the slider area must be removed by a subsequent process step. The slider rows are then cut to form individual sliders. Slider features can also be formed by placing the sacrificial structures solely over the carrier and along the slider cut zones. The sacrificial structures along the cut zones are removed by the cutting process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.