Solid surface observation method and apparatus therefor, and electronic apparatus formed of the solid surface observation apparatus and method of forming the electronic apparatus
US5510614A · kind A · utility
2Cited by
11References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 21, 1994 |
| Grant date | Apr 23, 1996 |
| Priority date | — |
| Expiry date | Jan 21, 2014 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/855
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A surface of an insulator or semiconductor substrate is irradiated with a beam such as an electron beam, an electromagnetic wave beam, an ion beam, etc. to excite carriers so as to form an electrical conductive layer on the surface of and in the inside of the substrate to thereby make it possible to perform observation and micro working on the insulator by using a scanning tunneling microscope.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.