Piezoelectric and/or electrostrictive actuator having dummy cavities within ceramic substrate in addition to pressure chambers, and displacement adjusting layers formed aligned with the dummy cavities
US5512793A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 2, 1995 |
| Grant date | Apr 30, 1996 |
| Priority date | — |
| Expiry date | Feb 2, 2015 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB41J2002/14387
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A piezoelectric and/or electrostrictive actuator including a ceramic substrate and piezoelectric and/or electrostrictive elements is disclosed. The ceramic substrate includes: a spacer plate having a plurality of windows which provide pressure chambers, the windows being formed in a row in the longitudinal direction of the spacer plate; a closure plate superposed on one of opposite major surfaces of the spacer plate so as to close one of opposite openings of each window; and a connecting plate superposed on the other major surface of the spacer plate so as to close the other opening of each window. The piezoelectric and/or electrostrictive elements are disposed on respective portions of the outer surface of the closure plate in alignment with the respective pressure chambers. The spacer plate has auxiliary windows formed adjacent to respective two outermost windows which are located at opposite ends of the row, the auxiliary windows providing dummy cavities within the ceramic substrate such that the dummy cavities are formed adjacent to respective two outermost pressure chambers, while displacement adjusting layers are integrally formed on respective portions of the outer surface o…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.