Method and apparatus for forming nanometric features on surfaces
US5512808A · kind A · utility
18Cited by
3References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 7, 1994 |
| Grant date | Apr 30, 1996 |
| Priority date | — |
| Expiry date | Apr 7, 2014 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T83/538
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
An instrument for forming nanometric features on surfaces of materials having a motor driven support for moving a workpiece on an X-Y-Z axis, a scribing tool of nanometric proportion engagable with the workpiece and a laser system for sensing movement. The tool is mounted on piezoelectric actuating means and the entire system is under the control of a programmed computer processing unit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.