Method of measuring gas concentrations and microfabricated sensing device for practicing same
US5514253A · kind A · utility
409Cited by
5References
38Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 13, 1994 |
| Grant date | May 7, 1996 |
| Priority date | — |
| Expiry date | Jul 13, 2014 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/404
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A microfabricated sensing device is disclosed, including methods for using the same for the measurement of the concentration of a gas in a sample. Unique sensor configurations are described which substantially eliminate electrode cross-contamination during operation of the microfabricated sensing devices.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.