Amorphous oxide film and article having such film thereon
US5514485A · kind A · utility
55Cited by
1References
8Claims
0Family size
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Key dates
| Filing date | Dec 19, 1994 |
| Grant date | May 7, 1996 |
| Priority date | — |
| Expiry date | Dec 19, 2014 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/31678
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
An amorphous oxide film composed essentially of an oxide containing at least one member selected from the group consisting of Zr, Ti, Hf, Sn, Ta and In and at least one member selected from the group consisting of B and Si.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.