Piezoelectric bimorph type acceleration sensor
US5515725A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 18, 1994 |
| Grant date | May 14, 1996 |
| Priority date | — |
| Expiry date | Mar 18, 2014 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P15/0922
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An acceleration sensor includes a sensor body obtained by forming first and second signal electrodes on outer major surfaces of first and second piezoelectric ceramic plates which are pasted to each other through an intermediate electrode. The sensor body is formed to be mechanically supported in the form of a center beam, and has first to third regions formed so that stress is caused in different directions in adjacent ones of the first to third regions upon acceleration. The first and second piezoelectric ceramic plates are polarized in opposite directions in the second region so that charges which are opposite in polarity to charges generated in the second region are not drawn from the signal electrodes in the first and third regions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.