Ultra high vacuum elastomer seal
US5516122A · kind A · utility
Inventor
Key dates
| Filing date | Dec 10, 1993 |
| Grant date | May 14, 1996 |
| Priority date | — |
| Expiry date | Dec 10, 2013 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S285/918
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
An ultra high vacuum (UHV) joint is scaled by an elastomer O-ring (7) between adjacent flanges (3,4), fitting in a seal cavity formed by grooves (41,42) in the flange (3,4) surfaces. The groove surfaces (41,42) are highly polished and shaped such that the O-ring (7) conforms to the groove surfaces (41,42) and contacts them substantially entirely when the flanges (3,4) are clamped together. This improved structure significantly reduces the permeation through and the gas leakage around the seal (7). The resulting seal (7) can support a vacuum of 10.sup.-11 torr or better. The conformal-groove geometry of the present invention can be used with seals other than elastomer seals, such as soft metal seals (55,65).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.