Pressure controlled cryopump regeneration method and system
US5517823A · kind A · utility
25Cited by
5References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 18, 1995 |
| Grant date | May 21, 1996 |
| Priority date | — |
| Expiry date | Jan 18, 2015 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S417/901
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
In a subatmospheric regeneration process, a relief valve and a roughing valve are coupled in parallel to a common roughing pump. During regeneration, the cryopump is warmed to release gases from cryopump stages. The relief valve opens at a first cryopump pressure level less than a predetermined maximum pressure. The maximum pressure is subatmospheric. The relief valve closes when the cryopump pressure drops below a second cryopump pressure level. Pressure in a line between the relief valve and the roughing pump is monitored to control the opening of the roughing valve to the roughing pump.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.