Patent · US Expired

Film testing

US5517860A · kind A · utility

24Cited by
6References
6Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 3, 1995
Grant dateMay 21, 1996
Priority date—
Expiry dateFeb 3, 2015

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N2203/0282
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Measurement of stress-strain relationships in thin films using substantially flat, parallel test surfaces with minimal width.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.