Etching molydbenum with ferric sulfate and ferric ammonium sulfate
US5518131A · kind A · utility
14Cited by
4References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 7, 1994 |
| Grant date | May 21, 1996 |
| Priority date | — |
| Expiry date | Jul 7, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/32134
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A molybdenum etching process which reduces hazardous treatment waste is disclosed. Etchants which can be used are ferric sulfate and ferric ammonium sulfate. Waste products resulting from this etch are Fe(OH).sub.3 and CaSO.sub.4.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.