Deposition barrier
US5518548A · kind A · utility
3Cited by
1References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 3, 1995 |
| Grant date | May 21, 1996 |
| Priority date | — |
| Expiry date | Aug 3, 2015 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/568
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Deposition sources deposit material onto mirrors used in ring laser gyros. The mirrors are placed in a rotating apparatus called a planet which rotates above the deposition sources which emit the material upwards. This operation will result alternating, multiple layers of the differing materials deposited onto the mirror. A barrier placed between the deposition sources prevents material from being deposited at high angles which increases the efficiency and ideal operability of the mirrors in the ring laser gyro.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.