Production of microstructure elements
US5518865A · kind A · utility
4Cited by
5References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 6, 1995 |
| Grant date | May 21, 1996 |
| Priority date | — |
| Expiry date | Mar 6, 2015 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S430/168
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
The invention relates to a process for producing microstructure elements having structure depths of from several .mu.m to the mm region by imagewise irradiation of polymers with X-rays, where the polymers employed are aliphatic polyesters.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.