Compact displacement detecting system with optical integrated circuit and connector in-line with optical axis
US5521394A · kind A · utility
3Cited by
3References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 6, 1994 |
| Grant date | May 28, 1996 |
| Priority date | — |
| Expiry date | Oct 6, 2014 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/026
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A displacement detecting system comprises an optical detector which includes a one-chip optical IC having a laser light source, light receiving elements for generating, in response to laser light reflected by a surface to be measured, a focus error signal indicative of a deviation of a distance between the surface and an objective lens from a focal length thereof, and a prism.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.