Gas discharge structure

US5528619A · kind A · utility

Assignee

• Deutsche Forschungsanstalt Fur Luft-Und Raumfahrt E.V. · DE

Inventors

• Hansjoerg Bochum · Leinfelden, DE
• Rolf Nowack · Leonberg, DE
• Hans Opower · Krailling, DE
• Wolfram Schock · Eppelheim, DE
• Klaus Wessel · Stuttgart, DE

Key dates

• Filing date: May 8, 1995
• Grant date: Jun 18, 1996
• Expiry date: May 8, 2015

Classification

• Technology area (CPC H): Electricity
• CPC primary: H05H1/46
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

In order to produce a gas discharge structure for two-dimensionally extending gas discharges comprising a pair of electrodes including a first and a second electrode which have mutually facing electrode surfaces, a gas discharge space arranged between the electrode surfaces with a plasma gas provided therein and a high frequency source with which a current can be fed into the pair of electrodes for producing a plasma between the first and the second electrode, in such a way that wavelength dependent modulations of the field strength substantially no longer occur in the gas discharge space, it be proposed that, the electrode surface of the first electrode is divided into two partial electrode surfaces that are located adjacent to one another in this electrode surface but are electrically separated from one another, that the partial electrode surfaces have mutually facing edge regions which extend at a defined distance from one another, that the partial electrode surfaces be connected to two terminals of the high frequency source which are at different potentials in such a way that a surface current flows over one of the edge regions to and then over the other one and that the second…