Optical fiber guide structure and method of fabricating same
US5528719A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Oct 26, 1994 |
| Grant date | Jun 18, 1996 |
| Priority date | — |
| Expiry date | Oct 26, 2014 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/3676
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical fiber guide structure used in industrial applications and a method of fabricating this structure. The optical fiber guide structure is excellent in dimensional accuracy, produces only small connection losses, and facilitates axial alignments and positioning. The method is initiated with preparing a silicon single-crystal substrate having a face of (110) orientation. An etching stopping layer, an epitaxial silicon layer, and a masking layer of silicon oxide are successively formed on the substrate. A photoresist is applied to the surface of the masking layer. Then, a development step, an etching step, and a peeling step are carried out. Thus, a substrate provided with rectangular grooves extending parallel to a (111) plane of the substrate is fabricated.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.