Thermal isolation structures for microactuators
US5529279A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 24, 1994 |
| Grant date | Jun 25, 1996 |
| Priority date | — |
| Expiry date | Aug 24, 2014 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16K2099/008
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A microactuator preferably in the form of a microminiature valve for controlling the flow of a fluid carried by a flow channel includes a first substrate having a thermally-actuated member selectively operated by a thermal actuator such that the first substrate thereby develops thermal energy, and a second substrate having opposed first and second major surfaces. The second substrate is attached to the first substrate at the first major surface. The second major surface defines an isolation cell for enclosing a volume when the second substrate is attached to the support to thereby reduce the thermal mass of the microactuator and to thermally isolate the first substrate from the support.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.