Micro-miniaturized, electrostatically driven diaphragm micropump

US5529465A · kind A · utility

Assignee

• Max-Planck-Gesellschaft zur Föderung der Wissenschaften e.V. · US

Inventors

• Roland Zengerle · Waldkirch, DE
• Axel Richter · Hersbruck, DE

Key dates

• Filing date: Mar 9, 1994
• Grant date: Jun 25, 1996
• Expiry date: Mar 9, 2014

Classification

• Technology area (CPC F): Mechanical Engineering; Lighting; Heating
• CPC primary: F04B53/1055
• WIPO field: Engines, pumps, turbines
• WIPO sector: Mechanical engineering

Abstract

An electrostatically driven diaphragm micropump comprises a first pump body s a counterelectrode and a second pump body having a diaphragm region. The two pump bodies establish a hollow space bordering on the diaphragm region and are electrically insulated from each other. The hollow space is filled with a medium different from the fluid to be pumped. The pump bodies may consist of a semiconductor material of different types of charge. The medium in the hollow space preferably has a high dielectric constant.