Coating apparatus
US5529627A · kind A · utility
3Cited by
5References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 28, 1995 |
| Grant date | Jun 25, 1996 |
| Priority date | — |
| Expiry date | Apr 28, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/3408
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The inside of a coating chamber (2) has a sputtering cathode (3) bearing a magnet set (6) and having a pot-shaped electrode (4) and a target (5). The electrode (4) is closed on the side facing away from the target (5) by a cover (11) to form a pressure equalizing chamber (12). The latter has a vacuum connection (13) for establishing a vacuum acting against the vacuum in the coating chamber (2).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.