Mechanically joined sputtering target and adapter therefor
US5529673A · kind A · utility
23Cited by
5References
19Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Feb 17, 1995 |
| Grant date | Jun 25, 1996 |
| Priority date | — |
| Expiry date | Feb 17, 2015 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/3407
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A target assembly in which the sputtering material is not soldered or otherwise metallurgically bonded to a backing plate. Rather, the target, which is homogeneously manufactured of sputtering material, is mechanically coupled (e.g., with bolts) to an adapter, which is itself permanently affixed to the chamber. As a result, the target can be easily uncoupled from the chamber and replaced, without also requiring removal and replacement of a backing plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.