Patent · US Expired

Process of making thin film 2H .alpha.-sic by laser ablation

US5529949A · kind A · utility

3Cited by
1References
12Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 17, 1994
Grant dateJun 25, 1996
Priority date—
Expiry dateMar 17, 2014

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10S438/931
  • WIPO fieldSurface technology, coating
  • WIPO sectorChemistry

Abstract

Thin films of 2H .alpha.-silicon carbide are produced by pulsed laser ablation.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.