Protective overlayer material and electro-optical coating using same
US5530581A · kind A · utility
157Cited by
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Key dates
| Filing date | May 31, 1995 |
| Grant date | Jun 25, 1996 |
| Priority date | — |
| Expiry date | May 31, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F2001/1536
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An electro-optical device comprising a series of thin films with an electrically controllable optical state provided with a protective overlayer that has a high optical transmittance and high resistance to penetration by H.sub.2 O. The protective overlayer is a film of amorphous silicon oxycarbide (a-SiOC:H) having an O to C ratio such that the optical absorption edge of the a-SiOC:H is 3 eV or greater and the H.sub.2 O transport through a 500 nm thick film of a-SiOC:H is 10.sup.12 molecules/cm.sup.2 -s or less.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.