Patent · US Expired

Sputter cathode

US5531876A · kind A · utility

2Cited by

5References

3Claims

0Family size

Assignee

Leybold GmBH · DE

Inventors

Mark Saunders · Naperville, US
Berthold Ocker · Hanau, DE

Key dates

Filing date	Feb 23, 1995
Grant date	Jul 2, 1996
Priority date	—
Expiry date	Feb 23, 2015

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC23C14/3407
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

The target (5) of a sputter cathode 3 is permanently bonded to a metallic backing plate (14, 15) with a coefficient of thermal expansion similar to that of the target (5). This backing plate (14, 15) is held removably on the electrode (4), for example by means of spring clips (16, 17).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.