Photoimageable polyimide coating
US5532110A · kind A · utility
4Cited by
5References
15Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 26, 1995 |
| Grant date | Jul 2, 1996 |
| Priority date | — |
| Expiry date | May 26, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/0387
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A photoimageable polyimide coating which can be prepared from the polymeric condensation product of 6FDA, DMDE or MEDA, and a photosensitizing moiety. More particularly, the present invention relates to a photoimageable polyimide coating useful for microelectronic applications.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.