Determination of dew point or absolute humidity
US5533393A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jan 13, 1995 |
| Grant date | Jul 9, 1996 |
| Priority date | — |
| Expiry date | Jan 13, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/121
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A microsensor system for determining water vapor content of the ambient atmosphere that uses a thin film suspended ceramic diaphragm structure featuring an embedded, patterned thin film heater, temperature sensor and an external film of an hygroscopic salt stabilized in a water-insoluble, crosslinked polymer matrix and contacting a pair of patterned electrodes which are proximate to the heater. The heater controls a selected electrical parameter of the salt to a fixed, predetermined value, as determined by its electrical characteristics. The dew point of the atmosphere is determined based on the dynamic relation with the salt dehydration temperature.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.