Method and apparatus for carrying a variety of products
US5536128A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 14, 1993 |
| Grant date | Jul 16, 1996 |
| Priority date | — |
| Expiry date | Jun 14, 2013 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49904
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An apparatus for carrying a variety of products for effectively processing and carrying plural kinds of works such as semiconductor wafers includes a plurality of processing stations for processing plural kinds of works, a carriage system for carrying plural kinds of works, and a transfer system for delivering works between the carriage system and a processing station. A method for carrying a variety of products is realized in which the carriage system simultaneously carries plural kinds of works between the plurality of processing stations and stops at a predetermined position of the transfer system, whereas the transfer system identifies and delivers the desired kind of work to and from the carriage system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.