Patent · US Expired

Large area sputter cathode having floating target segments

US5536380A · kind A · utility

3Cited by

8References

11Claims

0Family size

Assignee

Leybold GmBH · DE

Inventors

Berthold Ocker · Hanau, DE
Reiner Hinterschuster · Hammersbach, DE

Key dates

Filing date	May 23, 1995
Grant date	Jul 16, 1996
Priority date	—
Expiry date	May 23, 2015

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/3423
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

Individual target segments (A-F), are mounted on a mounting plate by means of locating studs inserted into mounting holes of elongate or circular cross sections in correspondence with the change in length caused by the thermal expansion of the target segments. The segments are retained by screws received in tapped bones in the studs, which are welded to the target backplates. The individual segments (A-F) each consist of a target backplate and a target bonded to the backplate. The perimeter of each backplate over laps the perimeter of each target segment, this overlap amounting to 0.05-0.2 mm when molybdenum or titanium is used for the target backplate and an indium-tin alloy is used for the sputter target.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.