Device for exciting a plasma to electron cyclotron resonance by means of a wire applicator of a static magnetic field and of a microwave field
US5536914A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 25, 1994 |
| Grant date | Jul 16, 1996 |
| Priority date | — |
| Expiry date | Feb 25, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H1/46
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The invention relates to a plasma excitation device comprising at least one electrically conductive wire applicator fed form an energy source in the microwave range and means for creating a magnetic field and adapted to create at least one surface having a constant magnetic field of a flux density that corresponds to electron cyclotron resonance. According to the invention, the wire applicator includes the means for creating the magnetic field, with the main component thereof being situated in a cross-section of the applicator and extending over at least a fraction of the length of the applicator, said applicator thus constituting an applicator both of a microwave electric field and of a static magnetic field.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.