Miniaturized mass filter
US5536939A · kind A · utility
83Cited by
3References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 7, 1994 |
| Grant date | Jul 16, 1996 |
| Priority date | — |
| Expiry date | Oct 7, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J49/288
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A mass filter is provided for use in a solid state mass spectrograph for analyzing a sample of gas. The mass filter is located in a cavity provided in a semiconductor substrate. The mass filter generates an electromagnetic field in the cavity which filters by mass/charge ratio an ionized portion of the sample of gas. The substrate has an inlet through which the gas to be analyzed flows through prior to reaching the mass filter. The mass filter can be either a single-focussing Wien filter or magnetic sector filter or can be a double-focussing filter which uses both an electric field and a magnetic field to separate the ions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.