Process for inspecting electrodes using rotation alignment correction
US5537050A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 28, 1994 |
| Grant date | Jul 16, 1996 |
| Priority date | — |
| Expiry date | Feb 28, 2014 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2801
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A process for inspecting an electrode plate having plural electrodes. The process includes the first step of using a rough alignment between the plate to be inspected and the standard inspecting plate so that the two lie on top of each other. One of the plates is then rotated relative to the other by a predetermined small angle. The electrical connection state between the two plates is then determined. A mathematical analysis of the position deviation between the two plates takes place. The analysis is based on the relative positions of the electrode inspected and the corresponding inspecting electrode before and after the rotation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.