Patent · US Expired

An interferometric measuring system having temperature compensation and improved optical configurations

US5537209A · kind A · utility

43Cited by
44References
41Claims
0Family size

Assignee

Inventor

Key dates

Filing dateJan 13, 1995
Grant dateJul 16, 1996
Priority date
Expiry dateJan 13, 2015

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01B2290/70
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

An improved interferometric measuring system wherein the system projects a first beam of light at a first measurement wavelength along a reference path to a reference reflector and a second beam of light at a second measurement wavelength along a measurement path to a measurement reflector, and determines a change in position of the measurement reflector from an interference pattern produced between a first light beam reflected from the reference reflector and a second light beam reflected from the measurement reflector, and wherein the system can measure atmospheric disturbances along the measurement path, concurrently with measuring a change in the position of the measurement reflector.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.