Leak indicator for vacuum systems and a method of searching for leaks in vacuum systems
US5537857A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jun 1, 1994 |
| Grant date | Jul 23, 1996 |
| Priority date | — |
| Expiry date | Jun 1, 2014 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01M3/202
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A leak indicator for detecting leaks in a vacuum system including a chamber and a system vacuum pump. The indicator is provided with a mass spectrometer for identifying the presence of a test gas in the system chamber and a high vacuum pump for producing the pressure required for operation of the mass spectrometer during a system leak test. A sealed conduit network is provided to connect the system chamber to the inlet of the mass spectrometer, and to the inlet side and exhaust side of the high vacuum pump. A first switching valve is provided within the sealed conduit in series between the system chamber and the inlets of the mass spectrometer and the high vacuum pump. Lastly, a constriction member is connected within the network conduit in series between the system chamber and the first switching valve to selectively provide a direct connection between the system chamber and the inlet side of the high vacuum pump, or between the system chamber and the exhaust side of the high vacuum pump.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.