Angular rate sensor
US5537872A · kind A · utility
15Cited by
7References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 3, 1993 |
| Grant date | Jul 23, 1996 |
| Priority date | — |
| Expiry date | Jun 3, 2013 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5621
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An angular rate sensor comprises a wafer of silicon etched to form tines with teeth which are interdigitated. The tines are excited into oscillation in the plane of the wafer, by applying suitable drive signals to create electrostatic forces between the tines. Rotation of the tines out of the plane of the wafer is detected by a suitable detector, such as a piezo-resistor on a support of the tines.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.