Semiconductor sensor for detecting physical amount without thermal hypsteresis where output wiring is disposed in a stress insensitive direction
US5537882A · kind A · utility
20Cited by
6References
18Claims
0Family size
Inventors
Key dates
| Filing date | Oct 3, 1994 |
| Grant date | Jul 23, 1996 |
| Priority date | — |
| Expiry date | Oct 3, 2014 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P15/123
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensor for detecting physical amount in which a gauge resistance value is made not to change even when a wiring material presents a yield phenomenon by wiring a wiring material Such as aluminum presenting a yield phenomenon by thermal stress in a stress insensitive direction of a piezogauge.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.