Vacuum coating apparatus

US5538560A · kind A · utility

Assignee

• Leybold GmBH · DE

Inventors

• Jaroslav Zejda · Rodenbach, DE
• Jurgen Henrich · Limeshain, DE

Key dates

• Filing date: Jul 26, 1994
• Grant date: Jul 23, 1996
• Expiry date: Jul 26, 2014

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C23C14/566
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A closed cylindrical housing defining a transport chamber has a top plate with a first opening communicating with an entry and exit chamber, and a second opening communicating with a coating chamber. A turntable rotatable about an axis in the transport chamber carries a holder to a first position below the first opening as it carries a like holder to a second position below the second opening. Each holder has thereon a container with a diameter smaller than the first opening but larger than the second opening. A first lifter raises a holder sealingly against the top plate around the first opening, the container thereon passing through the first opening to load or unload substrates. A second lifter raises the other holder so that the container thereon abuts a mask defining the second opening in order to coat a substrate in the container.