Reduced diameter retractable cylindrical mirror analyzer
US5541410A · kind A · utility
2Cited by
3References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 11, 1995 |
| Grant date | Jul 30, 1996 |
| Priority date | — |
| Expiry date | Jul 11, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J49/482
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A single pass cylindrical mirror analyzer for use in charged particle analysis has reduced size for mounting on a simple manipulator. The reduced size of the analyzer allows for placement of the analyzer on a linear motion feedtrough mounted on a conflat flange for insertion into and retraction from the analysis position. The reduced size of the cylindrical mirror analyzer in combination with good instrument resolution results in a versatile charged particle analyzer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.