Light attenuating anti-reflection coating including electrically conductive layers
US5541770A · kind A · utility
14Cited by
6References
2Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 30, 1994 |
| Grant date | Jul 30, 1996 |
| Priority date | — |
| Expiry date | Sep 30, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J29/868
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An anti-reflection coating includes a first layer of a transparent material having a low refractive index a second layer of an absorbing metal, a third layer of a material which may have a high or a low refractive index and a fourth layer of titanium nitride.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.