Torsional vibrators and light deflectors using the torsional vibrator
US5543956A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 6, 1993 |
| Grant date | Aug 6, 1996 |
| Priority date | — |
| Expiry date | Oct 6, 2013 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06K7/10653
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A second torsional vibrator having an outer frame and a second torsional spring is formed on the outer side of a first torsional vibrator having a pair of torsional springs and a plate member (reflection mirror), with a second torsional vibrator being fixed by the fixed part. The resonant frequency for the first torsional vibrator is set higher than that for the second torsional vibrator. The outer frame in the second torsional vibrator is driven substantially at the resonant frequency of the first torsional vibrator by an electromagnetic or electrostatic force. As a result, it becomes possible to obtain a stable and large scanning angle by using only a small driving force.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.