Automated defect classification system

US5544256A · kind A · utility

Assignee

• International Business Machines Corporation · US

Inventors

• Virginia H. Brecher · West Cornwall, US
• Paul Bao-Luo Chou · Montvale, US
• Robert W. Hall · Jericho, US
• Debra M. Parisi · Carmel, US
• Ravishankar Rao · White Plains, US
• Stuart L. Riley · Colchester, US
• Martin Clarence Sturzenbecker · Carmel, US

Key dates

• Filing date: Oct 22, 1993
• Grant date: Aug 6, 1996
• Expiry date: Oct 22, 2013

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S706/90
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An integrated visual defect detection and classification system. The invention includes adaptive defect detection and image labeling, defect feature measures, and a knowledge based inference shell/engine for classification based on fuzzy logic. The combination of these elements comprises a method and system for providing detection and analysis of product defects in many application domains, such as semiconductor and electronic packaging manufacturing.