Method of manufacturing a tip for scanning tunneling microscope using peeling layer
US5546375A · kind A · utility
64Cited by
8References
23Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 8, 1995 |
| Grant date | Aug 13, 1996 |
| Priority date | — |
| Expiry date | Nov 8, 2015 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/888
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
After a recessed portion 2 is formed in a first substrate made of single crystal silicon by crystal axis anisotropic etching, a peeling layer and a material of a fine tip which may be a noble metal or a noble metal alloy are formed. A second substrate is joined to the fine tip, and peeling is performed on the peeling layer, whereby the fine tip is formed on the second substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.