Apparatus and method for inspecting thin film transistor
US5550484A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Sep 25, 1995 |
| Grant date | Aug 27, 1996 |
| Priority date | — |
| Expiry date | Sep 25, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2608
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus and a method for inspecting a thin film transistor easily and securely with good reproducibility without adverse effect on elements of the thin film transistor even if the thin film transistor is not provided with a capacitative element. The apparatus includes an inspection signal generating device for inputting drive pulse signals and test pulse signals, respectively to a gate electrode; a test voltage generating device for inputting a test voltage to the source electrode in synchronism with the drive pulse signals; an external electrode arranged to be opposed to the drive electrode and forming therebetween a capacitance for storing test charges; and an electric signal detecting device for detecting electric signals output from the capacitance formed between the drive electrode and the external electrode to the source electrode in synchronism with test pulse signals to be input to the gate electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.